19

Estimation of sputtering rate by bombardment with argon gas ions

Year:
1980
Language:
english
File:
PDF, 325 KB
english, 1980
37

10.2116/bunsekikagaku.30.11_691

Year:
1981
File:
PDF, 921 KB
1981
45

10.1246/nikkashi.1980.1922

Year:
1980
File:
PDF, 2.06 MB
1980